Hello, We are SPS Global Surplus Equipment Specialist creating New Values!
We're uploading our supply available inventory list
We will always try to deliver the best quality with customer satisfaction first.
If you're interested or if there's a product you need
Please feel free to contact us!!
to contact
kyjang@semi-sps.com
+82 010-4955-5061
whatsapp:
https://whatsapp.com/channel/0029Vae5fP0DOQIagRvaNB1X
Business hours
09:00-18:00 KST Mon to Fri
Please send us an E-mail even if it's not our business hours! We'll get in touch with you ASAP:)
I hope you have a happy day today
SH-21E
LITHIUS
ADS1202H
VHF2060
DC Power Supply
0040-35966-P1
IC20
CPM-5000/REMOTE
8089702
MW-5D
XL820
PLu Neox Optical 3D Surface Profiler with motorized XY stage, 4 Lens (10X, 20X, 50X, 100X), anti vibration table
244143 REV B
406-240122-006
NEC SL-473F
ADS602H
S3000S
udk5114n
TELFORMULA Nitride
ADP122LM
Analog Control Fixture
Manual Controller
P5000
10.01.06.00878
CPM-5000/REMOTE
2229
MW-5D
FIB 200
A161
Viper 2430
406-240121-006
C1OT 6D TA 0100
ADS1202H
WS2500
PTC 3/8 NU
201339
A101L
VHF2060
Manual Controller
PRODUCER GT
PSS10
CPMX REMOTE CONTROLLER
603 9309
MW-5D
Sealer
372M
Viper 2435
406-240121-007
MU1238B-11B
PTR26761A
WS2500
ACS200
LITHIUS
various
ADS 602H
Analog Control Fixture
Manual Controller
PRODUCER GT
X-Eye SF160 SL
CPMX REMOTE CONTROLLER
WS820L
MW-5D
Sealer
472
Viper 2435XP
406-240121-008
MF300-02
PHI 680
WS2500
CB200
TELFORMULA Nitride
AMV Controller
VM 1000 A
Micro Match
PRODUCER GT
US-1737.125-S
CPMX REMOTE CONTROLLER
006 9105
MW-5D
Sealer
472
CI T1X0
409-240164-001
CKD-65/65
P1000
WS2500
ACS200
201335
VIISta 810
AMV Controller
Apex 1513
P5000
PRODUCER GT
US-1734.125-S
CPMX REMOTE CONTROLLER
6398
MW-5D
Sealer
472
CI T1X0
406-240040-002
TKS_36-21A
V8-G-AUTO
WV320
ACS200
LITHIUS
E11030450 REV 3
AX-100 MF
Z Scan
P5000
SEMVISION G5 MAX
FDL 115
CPMX-1000
6398
MW-5D
150857 SME-8-S-LED-24
Auto Wafer Loader Microscope Inspection
7700M (Spares)
406-240203-074
HX+75 A/C
GM9213E081
MP200
ACS200 Classic
TELFORMULA Oxide
SD331
AX-100 MF
Apex 1513
P5000
Producer GT Chamber
ECN4900PC
CPMX-1000
6398
MW-5D Controller
SM
NX16
2132 (mainbody only)
406-240101-001
CFT-75
Wafer/ Batch 740
MP200
ACS200 Classic
201342
936-70 SP
AX-100 MF
Apex 1513
P5000
CENTURA 5200
Q7
CPMX-1000
806-9311
MW-5D Controller
AMS24
Shotmatic 3
P-2
407-240100-001
RTE-221
Wafer/ Batch 740
WV320
ACS200 Plus
LITHIUS
VIISta HC
AX-100 MF
Apex 1513
P5000
Producer GT Chamber
Q8
CPMX-1000
603-9311
MW-5D Controller
Fineplacer 96
LNS-1
7700M (Spares)
406-240121-003
1033-0017-001
790
AXI-S
MA200
TELINDY Nitride
Varian
AX-3000 MF
Apex 3013
P5000
Producer GT Chamber
Q8
CPS 1000
806-9371
MW-5D Controller
PA182-39MLB-0603
VUV-VASE (Gen II)
7700M (Spares)
406-240121-002
RTE-110
SLR770
WV320
MA150 (Spare Parts)
201346
Varian Match
AX-3000 P
Apex 3013
P5000
P-5000 DxL
QS-1200
CPS 1000
SS-3100
MW-5D Controller
DeepProbe 300M
VUV-VASE VU302 (Gen I)
7700
406-240101-005
HX-750
PF05100-3B36S
Meta Pulse 300
MA150
TELINDY Nitride
Vacuum Valves
NAVIGATOR-1013
Apex 5513
P5000
Producer GT Chamber
QS-300
CPS 3000
DNS SS-3000-A
MW-5D Controller
CV92A
SCR32000CS‐ 450‐PM
SFS6400 MECHANICAL CALIBRATION Document Number 238
406-240203-074
HX-75
PF05100-3B36S
Meta Pulse 300
MA150
LITHIUS
MFC LOT
NAVIGATOR-1013
Aspect 2513
P5000
0010-00557 REV A
Q5
CV 1000
DNS SS-3000-A
MWD-25
Polaris 3500 (Spares)
JSM-6600F
Surfscan 64X0 Calibration Procedure
409-240163-001
7000
PFDUAL-6B36A
MP1-300
PM8
TELINDY Nitride
PM-5
NAVIGATOR-1013
Aspect 2513
P5000
Producer GT Chamber only
Bird Meter
CV 1000
DNS SS-3000-A
MWD-25LD
ExcaliburISR
JSM-5600
surfscan 64XX optical alignments Document Number 236
406-240100-005
MAGNUM II EV ICP
SLR 770
MU Controller
RC 16
TELINDY Plus IRAD Oxide
14040-je24-0004
NAVIGATOR-1013
Aspect 5013
P5000
PRODUCER SE
Dummy Load
CV 1000
DNS SS-3000-AR
MWD-25LD
Polaris 3500 (Spares)
JSM-6700F
SFS6x00 MECHANICAL CALIBRATION Document number 200
406-240101-008
MAGNUM 1 EV
SLR 720
PWB
RC 16(RC5)
Expedius
14040-je24-0004
NAVIGATOR-2013
ATN Match
P5000 Controller
PRODUCER SE
Power Meter
CV 500
DUOI
MWH-100
Polaris 3500 (Spares)
JFS-9855S
AIT I
406-240101-006
MAVERICK PT II
SLR 740
PD3800
RC 8-ACS 200
TELINDY Plus IRAD Oxide
14040-je24-0004
NAVIGATOR-2013
ATX 600
P5000 Controller
PRODUCER SE
Power Meter
CV 500
DNS SS-3000-AR
MWH-100
Polaris 3500 (Spares) 294157-200 REV C
JSM-6460LV
720-05721-000
2300 MWAVE STRPR
MAVERICK PT II
790
RIE-212 IPC
99-46450-01
Telius 305 DRM
14046-PE44-1016
NAVIGATOR-2013
ATX 600
P5000 Controller
PRODUCER SE
Power Meter
CX 2500S
DNS SS-3000-AR
MWH-100
Polaris 3500 (Spares) IKEGAMI PM-930A
JWS-7555
242163 Rev B PCB ADC-PFE Interface S76
406-240101-005
Maverick-II PT
LAPECVD
RIE-300NR
8626/8636
Telius 305 DRM
Dektak 200 Si
NAVIGATOR-3013
ATX 600
Phase Mag Detector
Centura DPS II CHAMBER
Power Sensor
CX 600H
DNS SU-3000
MWH-100
Polaris 3500 (Spares) VT106
JEM3200FS
AIT 1
406-240101-007
Maverick-II PT
MASK
RIE-300NR
8632-CTD-D
ACT12 (4C4D)
E475 Turbodisc
NAVIGATOR-3013
ATX 600
Phase Mag Detector
ENDURA 2 Chamber Only
Power Sensor
CX2500
DNS SU-3000
DCG-200Z
Polaris 3500 (Spares) IBM 8228 P/N 6091014
JEM-2010F
7700M (Spares)
FLEX GX E6
MAGNUM II ICP 1280
Liquitrack 776200
MR16R0828AN1-CKB
128197-001
Telius 305 DRM
Dimension 7000
NAVIGATOR-3013
ATX 600 Controller
Phase Mag Detector
ENDURA 2 Chamber Only
Power Sensor
CX2500
SS-3000-AR
MWH-100
Polaris 3500 (Spares) Proteon P7228 rev h
JFS-9815
289825A
406-240122-009
MAGNUM ICP 1280
MICRO LPC-210
Multilevel
606314-02 REV E
Telius SP 305 DRM
Vx340 Dimension
NAVIGATOR-3013
AZX 10
RF Match
CENTURA ENABLER
Power Sensor
CX2500
RF3
DCG-200Z
Polaris 3500 (Spares) Patlite SL-V
JSM-6400F
Surfscan 5500
FLEX GX E6
NGR2150
Custom
TCW-12000 CV
606314-02 REV 1
Tactras RLSA Poly
AP-150
NAVIGATOR-3013
AZX 10
RF Match Controller
CENTURA ENABLER
Power Sensor
CX2500S
RF3
MWH-100
Polaris 3500 (Spares)
JSM-6340F
P15XP
406-240122-008
Avatar 370 DTGS
Triple Tower II
RBA2C-202
606180-01 rev 04
Telius SP 305 DRM
Dektak 3030ST
NAVIGATOR-3013
AZX 10
RF Match Controller
CENTURA ENABLER
Power Sensor
ESC-2
QR 010 REV.4.0
DCG-200Z
Polaris 3500 (Spares)
JWS-7855S
5xxx Spare Part
406-240122-010
Magna 410 ft-ir
FU100F
RTC 2 Type XY-01
168160-001 REV 4
Tactras Vesta
Dimension X3D
OVATION-35162
AZX 10 Controller
RF Match Controller
CENTURA ENABLER
Power Sensor
ESC-2
VM 1000 A
MWH-25
Polaris 3500 (Spares)
JWS-7500E
AIT
TCP 9600SE
Magna 560 ft-ir
HPM5A2A2KS234
100 PSIG
606210-01 REV 4
Telius SP-305 SCCM
MS-35T
OVATION2560SF
AZX 63 Bias
RF Match Controller
CENTURA ENABLER
Power Sensor
LFMN8/5
VM 700 A
DCG-200Z
Polaris 3500 (Spares)
CD-SEM, JSM-6340F
2132 (8 inch Wafer Chuck Assembly)
Synergy
Magna 550
HPM5C1C1E1E1H1S240
PSM 115
VMEXB12D-CS
Tactras Vesta NV3
3100
PARAMOUNT MF 3KW
AZX 63 Bias
RF Match Controller
Etch dry chamber Only
Power Sensor
101187
Cesar 1312
MWH-25
Polaris 3500 (Spares)
JSM-7500F
Compumotor M575L11
Jetstream MZI
Im15
HPM5F2F2KS233
FAAST 230-DP+SPV+SLIC
165220-001 REV B
Trias Ti/TiN
NT3300
PARAMOUNT-6013
AZX 63 Controller HTCM
RF Match, VOR
Etch dry chamber Only
CC-13-C-P-B
101187
Cesar 1312
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
SDB
AIT
SPA 400
Im800
HPM5E2E2KS228
3100
168150-002 REV 3 S13
Tactras Vesta NV3
42800147
PARAMOUNT-6013
AZX 63 Controller HTCM
Vectra IMP
P5000
DCC 1406 E MP550
101187
Cesar 1312
MWH-25
Polaris 3500 (Spares)
WHD (Wafer Handling Diffusion)
PROMETRIX FT-650
CKS-36-21A
NSR-S307E
SPM2E1E1S304
IP 300
606200-01 REV 3 S5
Tactras Vigus
116-010069H
PARAMOUNT-6013
AZX Box Module
0040-77544
P5000
HIDEP
300159
Cesar 133
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
WHP (Wafer Handling Plasm)
710-039524-01, rev C
CA1000
Auto Wafer Loader for Microscope Inspection
9J5-360-371
UM-T50DT
606210-01 REV 4 S4
Tactras Vigus - Chamber Only
Verteq
PDX-1250
AZX Controller
0010-36736
0230-00101
72B
M57-51
Cesar 1330
MWH-5
Polaris 3500 (Spares)
SDB A
PROMETRIX FT750
Novaline K2005
NSR-S208D
9J8-200-371
SDI 4000
MSX1000
Tactras Vigus RK5
1600-34
PDX-900-2V
AZX Controller
0190-24834-002
0230-09130
Cyberite
806 6530
Cesar 136
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
Q2 WHD A
PROMETRIX FT750
BGM300
OptiStation 3
9K2-300-372
SCU 301H
12M06
Alpha 805
FLUOROCARBON RD4500 CLASSIC
PDX-900-2V
AZX Controller
PRIMO
Reflexion GT
Series 4000
B24-1.2
Cesar 136
MWH-5 Controller
Polaris 3500 (Spares)
JVX 6200
7700m (spares)
BGM300
Optistation 3
9J12-130-371
SCU-1000C
55-8-VCO-4
Alpha 805
1600-34
PDX-900-2V
AZX Controller
SGA200X25E-1DAA
0230-09259
4055/2
HCC15 3A +
Cesar 136
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
JVX6200
7700m (Spares)
DS-7000T/R
NWL860-TBM
6C32-EE-371
VANTEC SIGMA 200 K1
SS-4-VCO-3
Alpha 8S-Z (AP)
Superclean 1600-55M
PDX-900-2V
Cesar
B390.05
079-1202-0D
ABM 205
Cesar 136
MWH-5 Controller
Polaris 3500 (Spares)
JVX6200I
7700m (Spares)
LPD333.FR4.FT
NWL-860
DES-220-456AVL
EM3i
SS-4-VCO-4
Alpha 8S
SUPERCLEAN 1600
PDX-900-2V
Cesar 0230
885
Oasis
Gemini 2
CBA-M-2000-U
Cesar 136
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
JVX 7200
8100 (Spares)
LPJ333.SS.ADFTX
4S061-690-1
TERA21
C60
SS-605-4
TELFORMULA LPRO
UPH569H-B
PDX-900-2V
Cesar 1310
ACL-TS
0230-09130
139750-77
MMC100-2
Cesar 136
MWM-25-02
Polaris 3500 (Spares)
510
7700m (Spares)
Optiphot 200
SUPRA3
HVS 1500 Controller
GLV-4MW-3
Alpha 8S
UDK5114NA
PE-1000
Cesar 1312
USP206-2E
026-110-0B1
241251-0007
UF160-0
Cesar 2740
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
CLV
7700m (Spares)
INM100
4S586-580
TERA21
HVS 2K Controller
207/235/332
TELFORMULA LPRO
BLD1024H
PINACLE-20K
Cesar 1312
TM4500 AA4520
Centura 5200 High K CVD Process Chamber
ATR-8 robot alone
ResMap 178
Hilight
MWM-25-02
Polaris 3500 (Spares)
SPRINT
Roll-a-Lift
INM100
Irradiance Meter
DAS 2000
156 MM WAFER BOAT
SS-6-VC0
TELINDY Plus IRAD Oxide
VSP-88A(H)
PINACLE-20K
Cesar 136
23D306S
Centura 5200 MxP Chamber
load port
Duo SX (Spare Parts)
Hilight 133
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
98060-0000-001-01
655-650504-00
INM100
Irradiance Meter
TERA21
Wafer Boat
SX3100
P12XL
VSP-88H
PINACLE-20K
Cesar 136
AF9723
CENTURA ENABLER
MAG 7
Personal Kalos I
Hilight 133
MWM-25-02
Polaris 3500 (Spares)
8028
7700M (Spares)
KENSINGTON 300901
OPTIPHOT-200
SUPRA3
wafer boat
SX3100
2985-429208-W4
VSP-88H
RAPID-F
Cesar 2710
954-7700
PRODUCER GT
MTX2000
671-4394-01
VM 1000 A
DCG-200Z-S00
Polaris 3500 (Spares)
BK04A
7700m (Spares)
KENSINGTON 300901
OPTIPHOT-300
TERA21
Wafer Boat
T9600
TELINDY Plus process TBD
LWM9000
RAPID-F
Cesar 2720
T600 TU5
CENTURA ENABLER
MTX 4000
671-4270-02
VM 1000 A
OEM-10B
Polaris 3500 (Spares)
4123
7700m
KENSINGTON 300901
OPTIPHOT-88-AC IN
TERA21
OPUS2
DL 40 - 2A
Telius SP 305 DRM
43-2-131
RAPID-F
Cesar 2720
T600 TUS
PRODUCER GT
MTX2000
671-4394-04
VM 1000 A
DOFBC2-078
Zeta 300 G3
4124
7700m (spares)
KENSINGTON 300901
R1505A
TERA21
OPUS2
MTM 32 V01
TELFORMULA Nitride
Various
RAPID-F
Cesar 2720
TwinStep-B H3P04
Endura 5500 (spare parts)
MTX2000
672-6051-01
VM 1000 A
OEM-12
Zeta 300 G3
4129
7700m (spares)
Polyvar SC
R2005MF(VER3.09N), R2005HMF(VER5.09)
TERA21
OPUS2
MTM 32 V01
ALPHA 303I
VT 7018
RFG-3001
Controller
KORONA-1200P
ENDURA CL Chamber Only
MAG 7
Duo SX PC
VM 1000 A
MWH-100
Mercury (Spare Parts)
4526
3005503
Reichert POLYVAR SC
R2205HA, HB, HDIS, HMF
Supra IV
OPUS2
Power Supply
Triase+ Ti/TiN
VT 7018
VM-5000
Counter/Display
5513
ENDURA CL Chamber Only
METARA 7200
671-4276-50
VM 1000 A
OEM-12
Mercury (Spare Parts)
6497
ASSY.CBL.GND
Reichert-Jung, Kensington 300901
VT286
Supra IV
OPUS3
Power Supply
ALPHA 303I
VT 7018
VM-5000
Dome Match
ABI-3700 ANALYZER
ENDURA CL Chamber Only
SORTER MTX 2000
671-4359-01
VM 1000 A
MWH-100
Mercury (Spare Parts)
8020
AIT 1 (SPARES)
Reichert-Jung, Kensington 300901
EpiPhot 200
Supra IV
OPUS3
Power Supply
Unity Me 85 DRM
VT 7030 S2
XSTREAM-8K
Dome Match
Mirra Mesa
ENDURA CL Chamber Only
SORTER MTX 2000
671-1376-02
VM 1000 A
OEM-12
906498-100
8028
7700M (Spares)
Reichert-Jung, Kensington 300901
NSR-S620D
Supra IV
PMR_3000
Power Supply
FORMULA
VT 7030 S2
AZX 63 Controller HTCM
Dome Match
Various Spare Parts
ENDURA CL Chamber Only
TT1ENR2-1
671-4283-01
VM 1000 A
OEM-12B
905403-001
8060
7700M (Spares)
Reichert-Jung, Kensington 300901
NSR-SF140
SUPRA III
Infinity SACS 251216-120-CE
Power Supply
Unity Me 85 SCCM
VT 7030 S2
Cesar 1312
Dome Match
Mirra Mesa
ENDURA CL Chamber Only
DBM 2407 V2
671-4331-01
VM 700 A
OEM-12
907575-100
4524AD
7600M
INS3300
NSR-S204B
TM-7EX
Symphony 2300
TEX 25C
FORMULA
SAO-302LP
Hilight 133
Fixed Match
Mirra Mesa Integrated
ENDURA CL Chamber Only
Multitran 5
670-9426-05
005843
SPECTRUM 11002-00
501666-000
9388 Laser Pro
113387
INS3300
Eclipse L200
AFC 50D
Equinox
ATM-1100E
FORMULA
K2G20-24V-BR-10lsc
Integro 136
Fixed Match
Uvision 600SP
VANTAGE (Rediance 3.x)
Fixload 6M
671-0693-04
13.56Mhz Power Source
OEM-1250
500539-001
1471
655-6500504-00
INS3300
NSR-S609B
RXW-800
Sirius
LITHIUS
SV129-31W3A/2065
LF-5
Gencal Power Meter
Centura EPI
Mirra 3400 Stand-Alone
5850
671-4043-01
RMA-10-SSV
POD Interface Box
906496-100
1488 Plus
7700M (Spares)
LEICA INM20
NES1-H04
RXW-0826SFIX-SMIF
SST 421
LD 25
LITHIUS i+
UTC 800
PDX 2500
Gencal Power Meter
ENDURA CL
P5000
MTX2000/2
671-4098-952707
A30W
SH-21E
LITHIUS
ADS1202H
VHF2060
DC Power Supply
0040-35966-P1
IC20
CPM-5000/REMOTE
8089702
MW-5D
XL820
PLu Neox Optical 3D Surface Profiler with motorized XY stage, 4 Lens (10X, 20X, 50X, 100X), anti vibration table
244143 REV B
406-240122-006
NEC SL-473F
ADS602H
S3000S
udk5114n
TELFORMULA Nitride
ADP122LM
Analog Control Fixture
Manual Controller
P5000
10.01.06.00878
CPM-5000/REMOTE
2229
MW-5D
FIB 200
A161
Viper 2430
406-240121-006
C1OT 6D TA 0100
ADS1202H
WS2500
PTC 3/8 NU
201339
A101L
VHF2060
Manual Controller
PRODUCER GT
PSS10
CPMX REMOTE CONTROLLER
603 9309
MW-5D
Sealer
372M
Viper 2435
406-240121-007
MU1238B-11B
PTR26761A
WS2500
ACS200
LITHIUS
various
ADS 602H
Analog Control Fixture
Manual Controller
PRODUCER GT
X-Eye SF160 SL
CPMX REMOTE CONTROLLER
WS820L
MW-5D
Sealer
472
Viper 2435XP
406-240121-008
MF300-02
PHI 680
WS2500
CB200
TELFORMULA Nitride
AMV Controller
VM 1000 A
Micro Match
PRODUCER GT
US-1737.125-S
CPMX REMOTE CONTROLLER
006 9105
MW-5D
Sealer
472
CI T1X0
409-240164-001
CKD-65/65
P1000
WS2500
ACS200
201335
VIISta 810
AMV Controller
Apex 1513
P5000
PRODUCER GT
US-1734.125-S
CPMX REMOTE CONTROLLER
6398
MW-5D
Sealer
472
CI T1X0
406-240040-002
TKS_36-21A
V8-G-AUTO
WV320
ACS200
LITHIUS
E11030450 REV 3
AX-100 MF
Z Scan
P5000
SEMVISION G5 MAX
FDL 115
CPMX-1000
6398
MW-5D
150857 SME-8-S-LED-24
Auto Wafer Loader Microscope Inspection
7700M (Spares)
406-240203-074
HX+75 A/C
GM9213E081
MP200
ACS200 Classic
TELFORMULA Oxide
SD331
AX-100 MF
Apex 1513
P5000
Producer GT Chamber
ECN4900PC
CPMX-1000
6398
MW-5D Controller
SM
NX16
2132 (mainbody only)
406-240101-001
CFT-75
Wafer/ Batch 740
MP200
ACS200 Classic
201342
936-70 SP
AX-100 MF
Apex 1513
P5000
CENTURA 5200
Q7
CPMX-1000
806-9311
MW-5D Controller
AMS24
Shotmatic 3
P-2
407-240100-001
RTE-221
Wafer/ Batch 740
WV320
ACS200 Plus
LITHIUS
VIISta HC
AX-100 MF
Apex 1513
P5000
Producer GT Chamber
Q8
CPMX-1000
603-9311
MW-5D Controller
Fineplacer 96
LNS-1
7700M (Spares)
406-240121-003
1033-0017-001
790
AXI-S
MA200
TELINDY Nitride
Varian
AX-3000 MF
Apex 3013
P5000
Producer GT Chamber
Q8
CPS 1000
806-9371
MW-5D Controller
PA182-39MLB-0603
VUV-VASE (Gen II)
7700M (Spares)
406-240121-002
RTE-110
SLR770
WV320
MA150 (Spare Parts)
201346
Varian Match
AX-3000 P
Apex 3013
P5000
P-5000 DxL
QS-1200
CPS 1000
SS-3100
MW-5D Controller
DeepProbe 300M
VUV-VASE VU302 (Gen I)
7700
406-240101-005
HX-750
PF05100-3B36S
Meta Pulse 300
MA150
TELINDY Nitride
Vacuum Valves
NAVIGATOR-1013
Apex 5513
P5000
Producer GT Chamber
QS-300
CPS 3000
DNS SS-3000-A
MW-5D Controller
CV92A
SCR32000CS‐ 450‐PM
SFS6400 MECHANICAL CALIBRATION Document Number 238
406-240203-074
HX-75
PF05100-3B36S
Meta Pulse 300
MA150
LITHIUS
MFC LOT
NAVIGATOR-1013
Aspect 2513
P5000
0010-00557 REV A
Q5
CV 1000
DNS SS-3000-A
MWD-25
Polaris 3500 (Spares)
JSM-6600F
Surfscan 64X0 Calibration Procedure
409-240163-001
7000
PFDUAL-6B36A
MP1-300
PM8
TELINDY Nitride
PM-5
NAVIGATOR-1013
Aspect 2513
P5000
Producer GT Chamber only
Bird Meter
CV 1000
DNS SS-3000-A
MWD-25LD
ExcaliburISR
JSM-5600
surfscan 64XX optical alignments Document Number 236
406-240100-005
MAGNUM II EV ICP
SLR 770
MU Controller
RC 16
TELINDY Plus IRAD Oxide
14040-je24-0004
NAVIGATOR-1013
Aspect 5013
P5000
PRODUCER SE
Dummy Load
CV 1000
DNS SS-3000-AR
MWD-25LD
Polaris 3500 (Spares)
JSM-6700F
SFS6x00 MECHANICAL CALIBRATION Document number 200
406-240101-008
MAGNUM 1 EV
SLR 720
PWB
RC 16(RC5)
Expedius
14040-je24-0004
NAVIGATOR-2013
ATN Match
P5000 Controller
PRODUCER SE
Power Meter
CV 500
DUOI
MWH-100
Polaris 3500 (Spares)
JFS-9855S
AIT I
406-240101-006
MAVERICK PT II
SLR 740
PD3800
RC 8-ACS 200
TELINDY Plus IRAD Oxide
14040-je24-0004
NAVIGATOR-2013
ATX 600
P5000 Controller
PRODUCER SE
Power Meter
CV 500
DNS SS-3000-AR
MWH-100
Polaris 3500 (Spares) 294157-200 REV C
JSM-6460LV
720-05721-000
2300 MWAVE STRPR
MAVERICK PT II
790
RIE-212 IPC
99-46450-01
Telius 305 DRM
14046-PE44-1016
NAVIGATOR-2013
ATX 600
P5000 Controller
PRODUCER SE
Power Meter
CX 2500S
DNS SS-3000-AR
MWH-100
Polaris 3500 (Spares) IKEGAMI PM-930A
JWS-7555
242163 Rev B PCB ADC-PFE Interface S76
406-240101-005
Maverick-II PT
LAPECVD
RIE-300NR
8626/8636
Telius 305 DRM
Dektak 200 Si
NAVIGATOR-3013
ATX 600
Phase Mag Detector
Centura DPS II CHAMBER
Power Sensor
CX 600H
DNS SU-3000
MWH-100
Polaris 3500 (Spares) VT106
JEM3200FS
AIT 1
406-240101-007
Maverick-II PT
MASK
RIE-300NR
8632-CTD-D
ACT12 (4C4D)
E475 Turbodisc
NAVIGATOR-3013
ATX 600
Phase Mag Detector
ENDURA 2 Chamber Only
Power Sensor
CX2500
DNS SU-3000
DCG-200Z
Polaris 3500 (Spares) IBM 8228 P/N 6091014
JEM-2010F
7700M (Spares)
FLEX GX E6
MAGNUM II ICP 1280
Liquitrack 776200
MR16R0828AN1-CKB
128197-001
Telius 305 DRM
Dimension 7000
NAVIGATOR-3013
ATX 600 Controller
Phase Mag Detector
ENDURA 2 Chamber Only
Power Sensor
CX2500
SS-3000-AR
MWH-100
Polaris 3500 (Spares) Proteon P7228 rev h
JFS-9815
289825A
406-240122-009
MAGNUM ICP 1280
MICRO LPC-210
Multilevel
606314-02 REV E
Telius SP 305 DRM
Vx340 Dimension
NAVIGATOR-3013
AZX 10
RF Match
CENTURA ENABLER
Power Sensor
CX2500
RF3
DCG-200Z
Polaris 3500 (Spares) Patlite SL-V
JSM-6400F
Surfscan 5500
FLEX GX E6
NGR2150
Custom
TCW-12000 CV
606314-02 REV 1
Tactras RLSA Poly
AP-150
NAVIGATOR-3013
AZX 10
RF Match Controller
CENTURA ENABLER
Power Sensor
CX2500S
RF3
MWH-100
Polaris 3500 (Spares)
JSM-6340F
P15XP
406-240122-008
Avatar 370 DTGS
Triple Tower II
RBA2C-202
606180-01 rev 04
Telius SP 305 DRM
Dektak 3030ST
NAVIGATOR-3013
AZX 10
RF Match Controller
CENTURA ENABLER
Power Sensor
ESC-2
QR 010 REV.4.0
DCG-200Z
Polaris 3500 (Spares)
JWS-7855S
5xxx Spare Part
406-240122-010
Magna 410 ft-ir
FU100F
RTC 2 Type XY-01
168160-001 REV 4
Tactras Vesta
Dimension X3D
OVATION-35162
AZX 10 Controller
RF Match Controller
CENTURA ENABLER
Power Sensor
ESC-2
VM 1000 A
MWH-25
Polaris 3500 (Spares)
JWS-7500E
AIT
TCP 9600SE
Magna 560 ft-ir
HPM5A2A2KS234
100 PSIG
606210-01 REV 4
Telius SP-305 SCCM
MS-35T
OVATION2560SF
AZX 63 Bias
RF Match Controller
CENTURA ENABLER
Power Sensor
LFMN8/5
VM 700 A
DCG-200Z
Polaris 3500 (Spares)
CD-SEM, JSM-6340F
2132 (8 inch Wafer Chuck Assembly)
Synergy
Magna 550
HPM5C1C1E1E1H1S240
PSM 115
VMEXB12D-CS
Tactras Vesta NV3
3100
PARAMOUNT MF 3KW
AZX 63 Bias
RF Match Controller
Etch dry chamber Only
Power Sensor
101187
Cesar 1312
MWH-25
Polaris 3500 (Spares)
JSM-7500F
Compumotor M575L11
Jetstream MZI
Im15
HPM5F2F2KS233
FAAST 230-DP+SPV+SLIC
165220-001 REV B
Trias Ti/TiN
NT3300
PARAMOUNT-6013
AZX 63 Controller HTCM
RF Match, VOR
Etch dry chamber Only
CC-13-C-P-B
101187
Cesar 1312
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
SDB
AIT
SPA 400
Im800
HPM5E2E2KS228
3100
168150-002 REV 3 S13
Tactras Vesta NV3
42800147
PARAMOUNT-6013
AZX 63 Controller HTCM
Vectra IMP
P5000
DCC 1406 E MP550
101187
Cesar 1312
MWH-25
Polaris 3500 (Spares)
WHD (Wafer Handling Diffusion)
PROMETRIX FT-650
CKS-36-21A
NSR-S307E
SPM2E1E1S304
IP 300
606200-01 REV 3 S5
Tactras Vigus
116-010069H
PARAMOUNT-6013
AZX Box Module
0040-77544
P5000
HIDEP
300159
Cesar 133
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
WHP (Wafer Handling Plasm)
710-039524-01, rev C
CA1000
Auto Wafer Loader for Microscope Inspection
9J5-360-371
UM-T50DT
606210-01 REV 4 S4
Tactras Vigus - Chamber Only
Verteq
PDX-1250
AZX Controller
0010-36736
0230-00101
72B
M57-51
Cesar 1330
MWH-5
Polaris 3500 (Spares)
SDB A
PROMETRIX FT750
Novaline K2005
NSR-S208D
9J8-200-371
SDI 4000
MSX1000
Tactras Vigus RK5
1600-34
PDX-900-2V
AZX Controller
0190-24834-002
0230-09130
Cyberite
806 6530
Cesar 136
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
Q2 WHD A
PROMETRIX FT750
BGM300
OptiStation 3
9K2-300-372
SCU 301H
12M06
Alpha 805
FLUOROCARBON RD4500 CLASSIC
PDX-900-2V
AZX Controller
PRIMO
Reflexion GT
Series 4000
B24-1.2
Cesar 136
MWH-5 Controller
Polaris 3500 (Spares)
JVX 6200
7700m (spares)
BGM300
Optistation 3
9J12-130-371
SCU-1000C
55-8-VCO-4
Alpha 805
1600-34
PDX-900-2V
AZX Controller
SGA200X25E-1DAA
0230-09259
4055/2
HCC15 3A +
Cesar 136
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
JVX6200
7700m (Spares)
DS-7000T/R
NWL860-TBM
6C32-EE-371
VANTEC SIGMA 200 K1
SS-4-VCO-3
Alpha 8S-Z (AP)
Superclean 1600-55M
PDX-900-2V
Cesar
B390.05
079-1202-0D
ABM 205
Cesar 136
MWH-5 Controller
Polaris 3500 (Spares)
JVX6200I
7700m (Spares)
LPD333.FR4.FT
NWL-860
DES-220-456AVL
EM3i
SS-4-VCO-4
Alpha 8S
SUPERCLEAN 1600
PDX-900-2V
Cesar 0230
885
Oasis
Gemini 2
CBA-M-2000-U
Cesar 136
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
JVX 7200
8100 (Spares)
LPJ333.SS.ADFTX
4S061-690-1
TERA21
C60
SS-605-4
TELFORMULA LPRO
UPH569H-B
PDX-900-2V
Cesar 1310
ACL-TS
0230-09130
139750-77
MMC100-2
Cesar 136
MWM-25-02
Polaris 3500 (Spares)
510
7700m (Spares)
Optiphot 200
SUPRA3
HVS 1500 Controller
GLV-4MW-3
Alpha 8S
UDK5114NA
PE-1000
Cesar 1312
USP206-2E
026-110-0B1
241251-0007
UF160-0
Cesar 2740
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
CLV
7700m (Spares)
INM100
4S586-580
TERA21
HVS 2K Controller
207/235/332
TELFORMULA LPRO
BLD1024H
PINACLE-20K
Cesar 1312
TM4500 AA4520
Centura 5200 High K CVD Process Chamber
ATR-8 robot alone
ResMap 178
Hilight
MWM-25-02
Polaris 3500 (Spares)
SPRINT
Roll-a-Lift
INM100
Irradiance Meter
DAS 2000
156 MM WAFER BOAT
SS-6-VC0
TELINDY Plus IRAD Oxide
VSP-88A(H)
PINACLE-20K
Cesar 136
23D306S
Centura 5200 MxP Chamber
load port
Duo SX (Spare Parts)
Hilight 133
DCG-200Z-OPTIMA
Polaris 3500 (Spares)
98060-0000-001-01
655-650504-00
INM100
Irradiance Meter
TERA21
Wafer Boat
SX3100
P12XL
VSP-88H
PINACLE-20K
Cesar 136
AF9723
CENTURA ENABLER
MAG 7
Personal Kalos I
Hilight 133
MWM-25-02
Polaris 3500 (Spares)
8028
7700M (Spares)
KENSINGTON 300901
OPTIPHOT-200
SUPRA3
wafer boat
SX3100
2985-429208-W4
VSP-88H
RAPID-F
Cesar 2710
954-7700
PRODUCER GT
MTX2000
671-4394-01
VM 1000 A
DCG-200Z-S00
Polaris 3500 (Spares)
BK04A
7700m (Spares)
KENSINGTON 300901
OPTIPHOT-300
TERA21
Wafer Boat
T9600
TELINDY Plus process TBD
LWM9000
RAPID-F
Cesar 2720
T600 TU5
CENTURA ENABLER
MTX 4000
671-4270-02
VM 1000 A
OEM-10B
Polaris 3500 (Spares)
4123
7700m
KENSINGTON 300901
OPTIPHOT-88-AC IN
TERA21
OPUS2
DL 40 - 2A
Telius SP 305 DRM
43-2-131
RAPID-F
Cesar 2720
T600 TUS
PRODUCER GT
MTX2000
671-4394-04
VM 1000 A
DOFBC2-078
Zeta 300 G3
4124
7700m (spares)
KENSINGTON 300901
R1505A
TERA21
OPUS2
MTM 32 V01
TELFORMULA Nitride
Various
RAPID-F
Cesar 2720
TwinStep-B H3P04
Endura 5500 (spare parts)
MTX2000
672-6051-01
VM 1000 A
OEM-12
Zeta 300 G3
4129
7700m (spares)
Polyvar SC
R2005MF(VER3.09N), R2005HMF(VER5.09)
TERA21
OPUS2
MTM 32 V01
ALPHA 303I
VT 7018
RFG-3001
Controller
KORONA-1200P
ENDURA CL Chamber Only
MAG 7
Duo SX PC
VM 1000 A
MWH-100
Mercury (Spare Parts)
4526
3005503
Reichert POLYVAR SC
R2205HA, HB, HDIS, HMF
Supra IV
OPUS2
Power Supply
Triase+ Ti/TiN
VT 7018
VM-5000
Counter/Display
5513
ENDURA CL Chamber Only
METARA 7200
671-4276-50
VM 1000 A
OEM-12
Mercury (Spare Parts)
6497
ASSY.CBL.GND
Reichert-Jung, Kensington 300901
VT286
Supra IV
OPUS3
Power Supply
ALPHA 303I
VT 7018
VM-5000
Dome Match
ABI-3700 ANALYZER
ENDURA CL Chamber Only
SORTER MTX 2000
671-4359-01
VM 1000 A
MWH-100
Mercury (Spare Parts)
8020
AIT 1 (SPARES)
Reichert-Jung, Kensington 300901
EpiPhot 200
Supra IV
OPUS3
Power Supply
Unity Me 85 DRM
VT 7030 S2
XSTREAM-8K
Dome Match
Mirra Mesa
ENDURA CL Chamber Only
SORTER MTX 2000
671-1376-02
VM 1000 A
OEM-12
906498-100
8028
7700M (Spares)
Reichert-Jung, Kensington 300901
NSR-S620D
Supra IV
PMR_3000
Power Supply
FORMULA
VT 7030 S2
AZX 63 Controller HTCM
Dome Match
Various Spare Parts
ENDURA CL Chamber Only
TT1ENR2-1
671-4283-01
VM 1000 A
OEM-12B
905403-001
8060
7700M (Spares)
Reichert-Jung, Kensington 300901
NSR-SF140
SUPRA III
Infinity SACS 251216-120-CE
Power Supply
Unity Me 85 SCCM
VT 7030 S2
Cesar 1312
Dome Match
Mirra Mesa
ENDURA CL Chamber Only
DBM 2407 V2
671-4331-01
VM 700 A
OEM-12
907575-100
4524AD
7600M
INS3300
NSR-S204B
TM-7EX
Symphony 2300
TEX 25C
FORMULA
SAO-302LP
Hilight 133
Fixed Match
Mirra Mesa Integrated
ENDURA CL Chamber Only
Multitran 5
670-9426-05
005843
SPECTRUM 11002-00
501666-000
9388 Laser Pro
113387
INS3300
Eclipse L200
AFC 50D
Equinox
ATM-1100E
FORMULA
K2G20-24V-BR-10lsc
Integro 136
Fixed Match
Uvision 600SP
VANTAGE (Rediance 3.x)
Fixload 6M
671-0693-04
13.56Mhz Power Source
OEM-1250
500539-001
1471
655-6500504-00
INS3300
NSR-S609B
RXW-800
Sirius
LITHIUS
SV129-31W3A/2065
LF-5
Gencal Power Meter
Centura EPI
Mirra 3400 Stand-Alone
5850
671-4043-01
RMA-10-SSV
POD Interface Box
906496-100
1488 Plus
7700M (Spares)
LEICA INM20
NES1-H04
RXW-0826SFIX-SMIF
SST 421
LD 25
LITHIUS i+
UTC 800
PDX 2500
Gencal Power Meter
ENDURA CL
P5000
MTX2000/2
671-4098-952707
A30W
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